专利名称：APPARATUS FOR PROCESSING A MELT发明人：CARLSON, Frederick M.,KELLERMAN, Peter
L.,MORRELL, David,MACKINTOSH,Brian,DESAI, Nandish
申请号：EP15792841.7申请日：20150512公开号：EP3142973A4公开日：20171213
摘要：An apparatus for processing a melt may include a crucible configured to containthe melt, where the melt has an exposed surface that is separated from a floor of thecrucible by a first distance. The apparatus may further include a submerged heatercomprising a heating element and a shell disposed between the heating element and themelt, wherein the heating element does not contact the melt. The heating element maybe disposed at a second distance with respect to the exposed surface of the melt that isless than the first distance.
申请人：Varian Semiconductor Equipment Associates, Inc.
地址：35 Dory Road Gloucester, MA 01930 US
国籍：US
代理机构：Becker Kurig Straus
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