专利名称：Linear motor, stage apparatus, exposure
apparatus and device manufacturing method
发明人：Emoto, Keiji申请号：EP02251037.4申请日：20020215公开号：EP1233501A3公开日：20040512
专利附图：
摘要：Outflow of heat generated by a linear motor to the outside is suppressed. Alinear motor according to the present invention is a linear motor used in a vacuumatmosphere, including a stator, a movable element movable relative to the stator, and a
metal film formed on the surface of at least one of the stator and the movable element.This decreases the emissivity and reduces the outflow of heat by radiation from the linearmotor.
申请人：CANON KABUSHIKI KAISHA
地址：30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo JP
国籍：JP
代理机构：Beresford, Keith Denis Lewis
更多信息请下载全文后查看
因篇幅问题不能全部显示，请点此查看更多更全内容