专利名称：Focus Sensor, Inspection Apparatus,
Lithographic Apparatus and Control System
发明人：Arnold Sinke,Johan Maria Van Boxmeer申请号：US12921557申请日：20090330
公开号：US20110102774A1公开日：20110505
专利附图：
摘要：A focus sensor comprises a confocal sensor. Within the confocal sensor thereare a plurality of aperture plates positioned in front of a plurality of detectors. Ratherthan a conventional pinhole aperture shape there is a central aperture surrounded by a
plurality of outer aperture portions.
申请人：Arnold Sinke,Johan Maria Van Boxmeer
地址：Eindhoven NL,Saint Oedenrode NL
国籍：NL,NL
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