Pixel sensor array and method of manufacture there

专利名称：Pixel sensor array and method of

manufacture thereof

发明人：Einar Nygard申请号：US10506497申请日：20030218

公开号：US20050121598A1公开日：20050609

专利附图：

摘要：A sensor array having a plurality of pixels each including a sensor elementcoupled to a sensor input () of an electronic processing circuit is fabricated by firstforming an integrated circuit having at least one array of electronic processing circuits ()

each having a respective sensor input () disposed with terminal nodes of the integratedcircuit toward a first surface of the wafer. In respect of either each pixel or each terminalnode, an electrically conductive via () is formed through the wafer () extending fromeither the respective sensor input () or from the respective terminal node to a secondsurface () of the wafer opposite the first surface. This allows each electrically conductivevia () exposed at the second surface of the wafer to serve for connection thereto ofeither a sensor element or a terminal connection that is electrically connected throughthe electrically conductive via () to the respective sensor input or terminal node.

申请人：Einar Nygard

地址：Vettre NO

国籍：NO

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