Process for manufacturing a substrate and associat

专利名称：Process for manufacturing a substrate and

associated substrate

发明人：Olivier Rayssac,Fabrice Letertre申请号：US10972158申请日：20041022公开号：US07041577B2公开日：20060509

专利附图：

摘要：A process for producing a substrate is described. The process includesproviding an assembly having a first layer weakly bonded to a temporary support at aninterface therebetween. At least a portion of the first layer is selectively etched

substantially to the interface to create an etched zone. A second layer is then bonded toun-etched portions of the first layer to cover the etched zone and to form a closedcavity. The first layer is detached from the temporary support at the weak bond byproviding a raised pressure in the cavity.

申请人：Olivier Rayssac,Fabrice Letertre

地址：Grenoble FR,Grenoble FR

国籍：FR,FR

代理机构：Winston & Strawn LLP

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